[16p-A402-1~10] What is Plasma-Driven Science - Expectations for New Developments in Plasma Processes

[16p-A402-5] Metrology Informatics in Semiconductors

〇Shigetaka Tomiya^1,2,3 (1.Sony Semiconductor, 2.Sony Group, 3.Tokyo Tech)

Keywords:Metrology Informatics, Semiconductor, Electron Energy Loss Spectroscopy

In recent years, as advances in metrology and analysis technologies have made it possible to obtain large volumes of complex data, there has been a growing demand for methods to process these data and extract new knowledge and meaning from them. After explaining the importance of metrology informatics, the challenges and future expectations of metrology informatics will be presented, showing examples of recent research and our semiconductor analysis cases.