[16p-A409-1~17] 6.1 Ferroelectric thin films

△ [16p-A409-6] Evaluation of film thickness dependence of piezoelectric response in tetragonal Pb(Zr,Ti)O₃ films by x-ray diffraction with application of an electric field

〇(M1)MIKI NAKAHATA¹, KAZUKI OKAMOTO¹, KEISUKE ISHIHAMA¹, TOMOAKI YAMADA², HIROSHI FUNAKUBO¹ (1.Tokyo Tech., 2.Nagoya Univ.)

Keywords:piezoelectric response, tetragonal PZT films, domain structure

Ferroelectric material Pb(Zr, Ti)O₃ (PZT) films have been widely applied as microelectromechanical systems (MEMS). In (100)/(001) oriented tetragonal PZT films, an external electric field significantly changes the domain structure, resulting in a huge piezoelectric response. The piezoelectric response due to the domain structure change may be thickness dependence, but its effect has not been fully investigated. In this study, we prepared tetragonal PZT films were by pulsed laser deposition and investigated the thickness dependence of the piezoelectric response.