[16p-PA04-1~24] 13.7 Compound and power devices, process technology and characterization

[16p-PA04-18] Investigation of nitride semiconductor integrated circuits for driving small actuators

〇(M1)Yoshiki Akira¹, Akamatsu Tatsuya¹, Mashimo Tomoaki², Okada Hiroshi¹ (1.Toyohashi Univ.Technol., 2.Okayama Univ.)

Keywords:nitride semiconductor, integrated-circuit

We investigate nitride semiconductor integrated circuits that drive small ultrasonic motors. The basic specifications are (1) the drive frequency should be variable at around 1 MHz, (2) only E/D type n-channel MOSFETs should be used, and (3) passive elements should also be monolithically integrated. Based on these basic specifications, circuit design is performed using Si n-MOS parameters. The SPICE simulator was able to generate the pulse waveforms required to drive an ultrasonic motor, and an NMOS integrated circuit with voltage-controllable oscillation frequency was designed.