[16p-PA04-1~24] 13.7 Compound and power devices, process technology and characterization

[16p-PA04-8] Low-damage PEC etching on p-GaN surface and its electrochemical characterization

〇Umi Takatsu¹, Kouta Kubo¹, Taketomo Sato¹ (1.RCIQE,Hokkaido Univ.)

Keywords:p-GaN, PEC etching