[16p-PA08-1~18] 6.3 Oxide electronics

[16p-PA08-17] Structure and property change of copper oxide epitaxial films by VUV-light irradiation

〇Yuchi Qiao¹, Kenta Kaneko¹, Hiroki Shoji¹, Satoru Kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1.Tokyo Tech, 2.KISTEC)

Keywords:copper oxide, VUV-light irradiation, epitaxial film

The stable phases of copper oxide, CuO and Cu₂O, are both p-type semiconductors, and their heteroepitaxial layered structures have also been studied as photoactive layers in solar cells. In our group, epitaxial Cu₂O thin films were irradiated with VUV light and found to have controlled conductivity and topochemical structure. In this study, we investigated the effect of VUV irradiation of epitaxial Cu₂O thin films on the crystal structure and conductivity to fabricate CuO/Cu₂O heterostructures at room temperature and to control their properties.