[17a-A303-1~6] 3.12 Semiconductor optical devices (formerly 3.13)

[17a-A303-6] Microscopic carrier distribution imaging of black silicon solar cell by scanning nonlinear dielectric microscopy

〇Yasuo Cho¹, Beniamino Iandolo², Ole Hansen² (1.Tohoku Univ., 2.Tech. Univ. Denmark)

Keywords:Black Si, Scanning nonlinear dielectric microscopy, Carrier distribution imaging

In this paper, we investigated quantitatively the carrier distribution in a phosphorous (P) diffused black Si solar cell using SNDM. As a reference, we also measured the carrier distribution on a flat Si sample fabricated under the same P diffusion conditions. The precise carrier distributions in the emitter were visualized, which revealed the feature of carrier distribution in the emitter of black Si solar cell.