[17a-A305-1~9] 3.11 Nanoscale optical science and near-field optics (formerly 3.12)

[17a-A305-1] Inverse analysis of near-field light generated on a plasmonic nano-slit with angular spectra

〇Tomohiro Iwashita¹, Ryohei Matsuo¹, Zhong Sha¹, Haruhiko Ito¹ (1.Tokyo Tech)

Keywords:near-field light

We are developing a new approach of the non-demolition size measurement of the cross section of nanostructures with SNOM. To this end, the inverse analysis of near-field light is considered. We represent the near-field light intensity associated with the surface plasmon on a Ag coated nanoslit by means of angular spectra and numerically find the peak position through the Romberg analysis. There is the strong correlation between the curvature radius of the slit edge and the peak position. The use of the correlation function enables us to determine the curvature radius with high accuracy from the interpeak distance of the light intensity profile obtained by the SNOM measurement.