11:00 AM - 11:15 AM
[17a-A402-6] Precision optical technology for lithography equipment
Keywords:semiconductor, lithography equipment, optics
Presentation information
Symposium (Oral)
Symposium » 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~
[17a-A402-1~10] 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~
Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)
Emi Tamechika(Yokohama Natl. Univ.)