11:45 AM - 12:00 PM
[17a-A402-9] The next generation of 3D-stacked devices: From the fundamental research to the mass-production of Cu-Cu hybrid bonding
Keywords:Cu-Cu hybrid bonding
Symposium (Oral)
Symposium » 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~
Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)
Emi Tamechika(Yokohama Natl. Univ.)
11:45 AM - 12:00 PM
Keywords:Cu-Cu hybrid bonding