The 70th JSAP Spring Meeting 2023

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Symposium (Oral)

Symposium » 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

[17a-A402-1~10] 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)

Emi Tamechika(Yokohama Natl. Univ.)

11:45 AM - 12:00 PM

[17a-A402-9] The next generation of 3D-stacked devices: From the fundamental research to the mass-production of Cu-Cu hybrid bonding

〇Yoshihisa Kagawa1 (1.Sony Semiconductor Solutions)

Keywords:Cu-Cu hybrid bonding