[17a-A405-1~9] 3.6 Laser processing (formerly 3.7)

[17a-A405-5] Pump-probe measurement of the periodic surface structure formation with mid-infrared free-electron-laser pulse train

〇Shinichiro Masuno¹, Masaki Hashida^1,2, Heishun Zen³, Shigeki Tokita¹ (1.Kyoto Univ., 2.Tokai Univ., 3.IAE, Kyoto Univ.)

Keywords:LIPSS, semiconductor, mid-infared free-electron-laser

Time-resolved observation of laser induced periodic surface structures (LIPSS) formed by mid-infrared (11.4 μm) free electron laser pulse trains (more than 6000 pulses at 350 ps intervals) was performed using a 532-nm Nd:YAG laser. Although the number of pulses could not be controlled in previous studies, this experiment revealed that LIPSS formed in the early stage of the pulse train disappeared in the latter stage of the pulse train.