The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[17a-B401-1~9] 15.4 III-V-group nitride crystals

Fri. Mar 17, 2023 9:00 AM - 11:45 AM B401 (Building No. 2)

Atsushi Kobayashi(Univ. of Tokyo), Yusuke Hayashi(Osaka Univ.)

11:15 AM - 11:30 AM

[17a-B401-8] Epitaxial growth of c-BN layers by magnetron sputtering method

Kazuyuki Hirama1, Yoshitaka Taniyasu1, Kazuhide Kumakura1 (1.NTT BRL)

Keywords:cubic boron nitride, magnetron sputtering, diaomnd