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[17a-D209-6] High-quality superconducting IV-nitride thin films prepared by MBE
Keywords:nitride, molecular beam epitaxy
We report the crystal growth of group-IV nitride superconducting metals by molecular beam epitaxy. By utilizing electron emission impact spectroscopy, we obtained the highest quality TiN thin film with RRR = 15.8. Also, we successfully grew single-orientated ZrN and HfN superconducting films.