The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[17a-D419-1~12] 6.4 Thin films and New materials

Fri. Mar 17, 2023 9:00 AM - 12:00 PM D419 (Building No. 11)

Mamoru Yoshimoto(Tokyo Tech), Hiroyasu Yamahara(The Univ. Tokyo)

9:00 AM - 9:15 AM

[17a-D419-1] Non-destructive depth profile evaluation using surface scanning electron microscopy/ energy dispersive X-ray spectroscopy and quadratic programming

〇Yutaka Hoshina1, Yugo Kubo1, Yojiro Nakayama1 (1.SEI, Ltd.)

Keywords:thin film, non-destructive, profile