[17a-D419-1~12] 6.4 Thin films and New materials

[17a-D419-12] Sn dopant concentration dependence of electronic, optical, and magnetic properties of epitaxially grown Mn-doped ITO films

〇(D)Saiki Kitagawa¹, Toshihiro Nakamura^1,2 (1.Kyoto Univ., 2.ILAS, Kyoto Univ.)

Keywords:diluted magnetic semiconductor, transparent conducting film, sputter epitaxy

Diluted magnetic semiconductors have gained much attention as one of the most promising materials for spintronic devices. In this study, we focused on Mn-doped ITO films, which are dilute magnetic semiconductors of the oxide system. We investigated the correlation between the Sn dopant concentration and the physical properties of the film was to determine the optimal amount of the Sn dopant in the Mn-doped ITO films.