[17a-D419-1~12] 6.4 Thin films and New materials

[17a-D419-2] Composition tuning via laser fluence and formation of a new spinel-type crystalline phase in pulsed-laser deposition of Mg-Ir-O films

〇Masamichi Negishi¹, Kohei Fujiwara¹, Atsushi Tsukazaki^1,2 (1.IMR, Tohoku Univ., 2.CSIS, Tohoku Univ.)

Keywords:thin film, oxide, spinel structure

In the Mg-Ir-O system, no compound except for the ilmenite-type MgIrO₃ has been reported. We fabricated Mg-Ir-O thin films by pulsed-laser deposition. By changing the laser fluence, the Mg/Ir composition ratio in the films was regulated in the wild range of roughly 0.2 ≤ Mg/Ir ≤ 2. We discovered that a new crystalline phase of Mg-Ir-O with a spinel-type structure was formed in a specific condition of deposition.