[17a-E502-1~13] 7.1 X-ray technologies

[17a-E502-2] Examination of Soft X-ray Beam Splitter using Multilayer coated Grating

〇Takeo Ejima^1,2, Tadashi Hatano^1,2 (1.Tohoku Univ., SRIS, 2.Tohoku Univ., IMRAM)

Keywords:beam splitter, reflection multilayer, diffraction grating

In soft X-ray region, a diffraction grating with a multilayer coating on its surface was considered to operate as a beamsplitter. By coating a multilayer on the surface of the diffraction grating, the light intensity of the 1st-order diffraction light due to the multilayer reflection can be increased to the same level of the 0th-order light due to total reflection from the grating surface. In the study, the 1st-order diffraction angle was obtained from the parameters of the diffraction grating, and then determined the conditions under which the light intensity of the 1st-order diffraction light is comparable to that of the 0th-order light.
In the presentation, it will be presented that the details of the design, and the results of the operation verification.