[17a-PA01-1~7] 7 Beam Technology and Nanofabrication (Poster)

[17a-PA01-7] Enhanced effect of atomic oxygen-induced polyimide etching in very low Earth orbit

〇KUMIKO YOKOTA¹, WATARU IDE¹, ATSUSHI FUJITA¹, SASUGA HORIMOTO¹, SANTA NISHIOKA¹, TOWA USHIJIMA¹, MASAHITO TAGAWA¹, YUTA TSUCHIYA², AKI GOTO², KAZUKI YUKUMATSU², EIJI MIYAZAKI², YUGO KIMOTO² (1.Kobe Univ., 2.JAXA)

Keywords:VLEO, polyimide, atomic oxygen