[17a-PA04-1~18] 12.4 Organic light-emitting devices and organic transistors

[17a-PA04-4] Diffusion barrier films using multiple oxide films with alumina and titania

〇(M1)Ryusei Sato¹, Kentaro Saito^1,2, Kensaku Kanomata³, Junichi Tanaka⁴, Hiroyuki Yamaguchi⁴, Takayuki Chiba³, Junji Kido³, Fumihiko Hirose¹ (1.Yamagata Univ., 2.JSPS Research Fellow, 3.FROM Yamagata Univ., 4.Lumiotec Inc.)

Keywords:Diffusion barrier, Atomic Layer Deposition, OLED