The 70th JSAP Spring Meeting 2023

Presentation information

Poster presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PA05-1~7] 16.3 Bulk, thin-film and other silicon-based solar cells

Fri. Mar 17, 2023 9:30 AM - 11:30 AM PA05 (Poster)

9:30 AM - 11:30 AM

[17a-PA05-5] Optimization of 2-step deposition process of i-a-Si:H passivation layer deposited by facing target sputtering

Shasha Li1, Shinsuke Miyajima1 (1.Tokyo Tech)

Keywords:amorphous silicon, surface passivation, sputtering