[17a-PB01-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[17a-PB01-6] Sol-gel deposition of low-resistivity Al-doped ZnO thin films

〇Koji Abe¹, Tasuku Kubota¹ (1.Nagoya Inst.Tech.)

Keywords:zinc oxide, sol-gel, transparent conductive oxide