1:45 PM - 2:00 PM
△ [17p-A305-4] Metalens-integrated MPPC improves the photon detection efficiency
Keywords:SPAD, metalens, nanophotonics
MPPC (Multi Pixel Photon counting) is a solid-state type of photodetector, which is used in many kinds of applications including Lidar and TOF-PET. MPPC contains single photon avalanche diode (SPAD) array. Trench regions are formed at the boundaries of each SPAD. While the trench region suppresses crosstalk, it doesn’t act as a photo-sensitivity region. Here, we demonstrated the improvement the performance of MPPC by integrating metalenses with the SPADs to guide incident photons on the the photo effective region instead of illuminating to the trench regions.