[17p-A405-1~14] 3.6 Laser processing (formerly 3.7)

[17p-A405-13] Determination of optimial laser irradiation parameter by Prediction of laser induced nano-periodic structure using deep learning

〇(B)Ryota Masuda¹, Yoshio Hayasaki¹, Satoshi Hasegawa¹ (1.Center for Optical Research and Education, Utsunomiya Univ.)

Keywords:nano-periodic structure

In situ prediction of nano-periodic structures generated by femtosecond laser pulses was demonstrated using machine learning to rapidly optimize the laser parameters in the fabrication of the nanostructure. The machine learning model generated a detailed image of the nano-periodic structure based on the laser irradiation parameters used in laser processing. In the experiment, the effectiveness of the proposed method was verified by comparing an image generated by the machine learning and an experimental SEM image of the nano-periodic structure.