[17p-A408-1~14] 6.3 Oxide electronics

[17p-A408-6] High sensitivity acetone detection with In-WO₃ thin film

〇Daiki Iwase¹, Zicheng Zhu¹, Takuya Nakanishi², Toru Asahi² (1.Optorun Co., Ltd., 2.Wasede Univ.)

Keywords:metal Oxide, acetone detection, gas sensing

The concentration of acetone in exhaled breath is 300 to 900 ppb in healthy people and a few ppm in diabetic patients, so high sensitivity is necessary to realize real-time measurement. The purpose of this study is to investigate the possibility of achieving high sensitivity in sub ppm acetone by focusing on the change in the electron-deficient layer due to the increase in surface area and metal doping by the microstructure substrate to achieve high sensitivity.