【Highlighted Presentation】Development of 230 nm Wavelength Range UV-LEDs on Sputtered and Annealed AlN

Kenjiro Uesugi; Shuhei Ichikawa; Shiyu Xiao; Kanako Shojiki; Takao Nakamura; Masahiko Tsuchiya; Kazunobu Kojima; Hideto Miyake

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[17p-B401-1~15] 15.4 III-V-group nitride crystals

Fri. Mar 17, 2023 1:15 PM - 5:30 PM B401 (Building No. 2)

Hideaki Murotani(Tokuyama College), Maki Kushimoto(Nagoya Univ.), Takao Oto(Yamagata Univ.)

2:45 PM - 3:00 PM

[17p-B401-6] 【Highlighted Presentation】Development of 230 nm Wavelength Range UV-LEDs on Sputtered and Annealed AlN

〇Kenjiro Uesugi^1,2, Shuhei Ichikawa^3,4, Shiyu Xiao⁵, Kanako Shojiki^3,5, Takao Nakamura^5,6, Masahiko Tsuchiya⁷, Kazunobu Kojima³, Hideto Miyake⁵ (1.MRPCO, Mie Univ., 2.Grad. Sch. of RIS, Mie Univ., 3.Grad. Sch. of Eng., Osaka Univ., 4.Research Center for UHVEM, Osaka Univ., 5.Grad. Sch. of Eng., Mie Univ., 6.IIS, The Univ. of Tokyo, 7.Stanley Electric Co.)

Keywords:UV-LED, AlGaN, AlN