4:15 PM - 4:30 PM
[17p-D419-10] Thermoelectric property of nanostructured Mg/Si/Sn thin films controlled by combinatorial sputter coating method
Keywords:Sputter, Thin film, Nanostructure
Nanostructure controlled MgSiSn-based thin films was synthesized by using an originally developed combinatorial sputter coating system (COSCOS). Complex nanostructures could be synthesized by annealing from initial superlattice structures. The nanostructured thin films were found to have reduced thermal conductivity, increased Seebeck coefficient, and improved dimensionless figure-of-merit (zT). The present results suggest the possibility of improving thermoelectric conversion efficiency through nanostructure control.