The 70th JSAP Spring Meeting 2023

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22 Joint Session M » 22.1 Joint Session M "Phonon Engineering"

[17p-D511-1~15] 22.1 Joint Session M "Phonon Engineering"

Fri. Mar 17, 2023 1:15 PM - 5:30 PM D511 (Building No. 11)

Yoshiaki Nakamura(Osaka Univ.), Masahiro Nomura(Univ. of Tokyo), Daiki Hatanaka(NTT)

2:00 PM - 2:15 PM

△ [17p-D511-4] Evaluation of Thermal Conductivity Characteristics near Insulator/SOI interface by UV Raman Spectroscopy

〇Keita Sahara1, Ryo Yokogawa1,2, Motohiro Tomita3,4, Takanobu Watanabe4, Atsushi Ogura1,2 (1.Meiji Univ., 2.MREL, 3.Seikei Univ., 4.Waseda Univ.)

Keywords:Raman spectroscopy, Si nanowires, Thermal conductivity