[17p-D519-1~10] 6.6 Probe Microscopy

[17p-D519-5] Evaluation of tungsten tips prepared by hydrogen-oxygen gas flame-etching

〇(B)Nobuhiko Utsunomiya¹, Masahiko Tomitori², Toyoko Arai¹ (1.Kanazawa Univ., 2.Japan Advanced Institute of Science and Technology)

Keywords:surface science, scanning probe microscopy, flame-etching

In order to observe and evaluate samples with high spatial resolution using a scanning probe microscope (SPM), the tip of the SPM tip must be sharp and clean. A flame etching method, in which a tungsten wire is inserted into a high-temperature flame and etched, was reported as one of the methods to fabricate metal tips for scanning tunneling microscopes and atomic force microscopes. In this study, flame etching was performed using hydrogen-oxygen gas mixture, and the fabricated tips were observed and evaluated by scanning Auger electron spectroscopy and backscattered electron diffraction. In the presentation, the shape, composition, and crystallinity of the fabricated tip will be discussed.