4:35 PM - 4:50 PM
[17p-E302-7] Atomic layer deposited ternary amorphous oxide semiconductor In-Ga-O toward 3D-integrated device
Keywords:oxide semiconductor, atomic layer deposition
Symposium (Oral)
Symposium » What is next killer application after display? Leading edge technology of oxide semicondutor
Fri. Mar 17, 2023 1:30 PM - 5:55 PM E302 (Building No. 12)
Yukiharu Uraoka(NAIST), Masaharu Kobayashi(Univ. of Tokyo), Keiji Ikeda(KIOXIA)
4:35 PM - 4:50 PM
Keywords:oxide semiconductor, atomic layer deposition