The 70th JSAP Spring Meeting 2023

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Symposium (Oral)

Symposium » What is next killer application after display? Leading edge technology of oxide semicondutor

[17p-E302-1~8] What is next killer application after display? Leading edge technology of oxide semicondutor

Fri. Mar 17, 2023 1:30 PM - 5:55 PM E302 (Building No. 12)

Yukiharu Uraoka(NAIST), Masaharu Kobayashi(Univ. of Tokyo), Keiji Ikeda(KIOXIA)

4:35 PM - 4:50 PM

[17p-E302-7] Atomic layer deposited ternary amorphous oxide semiconductor In-Ga-O toward 3D-integrated device

〇Takanori Takahashi1, Mutsunori Uenuma1, Masaharu Kobayashi2, Yukiharu Uraoka1 (1.NAIST, 2.Univ. of Tokyo)

Keywords:oxide semiconductor, atomic layer deposition