[17p-PA04-1~10] 3.13 Optical control devices and optical fibers (formerly 3.14)

[17p-PA04-9] Fabrication of the optical waveguides of Si₃N₄ with the process using Al₂O₃ masks

〇(M2)NAOAKI SAITO¹, Junichi Shibasaki², Masakazu Nanba², Yuji Miyamoto², Masato Miura², Nobuhiko Funabashi², Yasunobu Akiyama¹, Kenichi Aoshima², Yoshikuni Hirano² (1.Tokai Univ., 2.Japan Broadcast Corporation)

Keywords:Optical Phased Array, microfabrication, process