The 70th JSAP Spring Meeting 2023

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Poster presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[17p-PA06-1~14] 6.1 Ferroelectric thin films

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PA06 (Poster)

1:30 PM - 3:30 PM

[17p-PA06-9] Crystallization process of ALD deposited HfxZr1-xO2 thin films on Ga2O3 substrate Ⅱ

〇Keigo Naito1, Koichi Yamaguchi2, Takeshi Yoshimura1, Norifumi Fujimura1 (1.Osaka Metropolitan Univ., 2.Osaka Pref. Univ.)

Keywords:Hf-based ferroelectric, Gallium Oxide, ALD methods