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[17p-PA09-69] Compound Refractive Lenses Made of Si for Focusing High-energy X-rays in Sub-micron Size
Keywords:compound refractive lenses made of silicon, focusing X-rays
We developed compound refractive lenses made of silicon for focusing high-energy X-rays up to 35 keV. We evaluated the performance of X-ray focusing with the lenses in SPring-8 BL13XU. As a result, we successfully obtained beam sizes less than 600 nm with the X-ray energy from 12.4 keV to 35 keV.