[18a-A202-1~8] 3.13 Optical control devices and optical fibers (formerly 3.14)

[18a-A202-6] Simulation analysis of optical switch operation using a phase change material

〇Haruyuki Sano¹, Masashi Kuwahara² (1.NIT Ishikawa College, 2.AIST)

Keywords:optical switch, phase change, GST

hysical simulation of optical switch using a GST (Ge₂Sb₂Te₅) phase change material showed that non-uniform heating of a GST film caused the extinction ratio of the optical switch to decrease. In this study, we clarified the origin of the non-uniform heating, and also suggested new models with the structural change of the ITO heater layer. In these new models, it was found that recrystallization of the GST was suppressed during the amorphization process and the extinction ratio performance was improved.