The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

23 Joint Session N "Informatics" » 23.1 Joint Session N "Informatics"

[18a-A401-1~9] 23.1 Joint Session N "Informatics"

Sat. Mar 18, 2023 9:00 AM - 11:30 AM A401 (Building No. 6)

Naoka Nagamura(NIMS), Kanta Ono(Osaka Univ.)

9:00 AM - 9:15 AM

[18a-A401-1] Evaluation of RHEED intensity oscillations by luminance histogram analysis using machine learning technique

〇(M2)Asako Yoshinari1,2, Yusuke Kozuka2, Yasunobu Ando3, Tarojiro Matsumura3, Masato Kotsugi1, Naoka Nagamura1,2,4 (1.Tokyo Univ. of Science, 2.NIMS, 3.AIST, 4.JST-PRESTO)

Keywords:RHEED, RHEED intensity oscillations, machine learning

RHEED (Reflection High-Energy Electron Diffraction) is widely used to evaluate surface conditions during thin film fabrication, especially for estimating film thickness using intensity oscillations. But only a part of the diffraction pattern information is available. In this study, we applied high-throughput peak fitting analysis using the EM algorithm, which is a kind of maximum likelihood estimation method, to the luminance histograms of RHEED images of the growth process of Nb-doped STO thin films. We tried to propose a new skill-independent evaluation method of RHEED intensity oscillation by using the information of the entire pattern.