[18a-A405-1~9] 3.6 Laser processing (formerly 3.7)

[18a-A405-3] Lattice Structure Dependence of Transmittance Spectrum in Moth-eye Antireflective Structures

〇Rikuo Koike¹, Shotaro Kawano¹, Haruyuki Sakurai¹, Kuniaki Konishi¹, Norikatsu Mio¹ (1.Graduate School of Science, The Univ. of Tokyo)

Keywords:ultrashort pulse laser processing, moth-eye structure, terahertz wave

Moth-eye structure is a structure in which a large number of protruding structures are arranged on the surface of a material, and it exhibits antireflection properties against Fresnel reflections. Moth-eye structures in the terahertz band are mainly fabricated by ultrashort pulse laser processing, and most of them are square lattice. In this study, we research the lattice structure dependence of transmittance spectrum in moth-eye structure and show that a hexagonal lattice can provide broadband antireflection properties.