[18a-A405-1~9] 3.6 Laser processing (formerly 3.7)

[18a-A405-6] Femtosecond laser irradiation on Fe/Cr/Ni film deposited on SiC

〇Taketo Furuichi¹, Makoto Yamaguchi², Tatsuya Okada¹, Takuro Tomita¹ (1.Tokushima Univ., 2.Akita Univ.)

Keywords:femtosecond laser

We investigated the effect of non-thermal processing peculiar to femtosecond laser irradiation on metal thin films on transparent substrates. A Fe/Cr/Ni film was fabricated on a transparent SiC substrate, and femtosecond laser irradiation was performed focusing on the SiC/metal interface. The modification of the metal thin film due to laser irradiation was investigated by observing the cross section of the irradiated area using a transmission electron microscope.