The 70th JSAP Spring Meeting 2023

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Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

[18a-A408-1~9] 8.3 Plasma nanotechnology

Sat. Mar 18, 2023 9:00 AM - 11:30 AM A408 (Building No. 6)

Takeshi Kitajima(National Defence Academy), Kunihiro Kamataki(Kyushu University)

10:45 AM - 11:00 AM

[18a-A408-7] Effect of carbon nanoparticle insertion on mechanical strength of two-layer a-C:H films deposited by plasma CVD method

〇(B)Tatsuya Tabuchi1, Shinjiro Ono1, Takamasa Okumura1, Kunihiro Kamataki1, Naoto Yamashita1, Naho Itagaki1, Kazunori Koga1,2, Masaharu Shiratani1 (1.Kyushu Univ., 2.NINS)

Keywords:plasma, nanoparticle