[18a-B401-1~9] 15.4 III-V-group nitride crystals

△ [18a-B401-9] Spherical Aberration Correction and Evaluation of Spatial Resolution in 3D Imaging of Dislocations in GaN Crystal using Light Needle Microscopy

〇Yuki Miura^1,2, Yuichi Kozawa², Tomoyuki Tanikawa³, Yuuki Uesugi², Shunichi Sato² (1.Grad. Sch. of Eng., Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.Grad. Sch. of Eng., Osaka Univ.)

Keywords:GaN, imaging, photoluminescence

We have proposed a high-speed 3D imaging technique based on the principle of simultaneous excitation in the depth direction by Bessel beam with long depth of focus and recovery of depth information by Airy beam with self-curvature. By applying this technique to the observation of dislocations in GaN crystals, it is possible to obtain 3D images with a single 2D scan of the excitation spot. We report the results of evaluation of the imaging performance for dislocations in deep GaN crystals by implementing an optical system that corrects spherical aberration, which can be challenge in GaN observation.