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▼ [18a-D511-5] Large-scale Integration of Cavity-free Micro Thermoelectric Device (4) Sensitivity for Heat Flux
キーワード：Thermoelectric generator, GeSn device, Seebeck effect
This work demonstrates a large-scale integrated thermoelectric (TE) device with a cavity-free architecture that can serve as a suitable heat flux sensor. Conventional heat flux sensors have difficulty to achieve both detection sensitivity and minimal impact on the measurement target. -free TE device could solve these problems, because its thermal resistance can be kept small and the sensitivity for the heat flux can be improved by miniaturization and large-scale integration. In this work, we investigated the heat flux sensitivity of our proposed device by Fabricating a large-scale integrated TE module.