13:45 〜 14:00
[18p-A405-4] Holographic laser processing machine with a rotating stage
キーワード：laser processing, ultra short pulse laser
The constant demand for more advanced laser processing and higher throughput will expand the use of technologies that spatially shape laser beams to irradiate materials. Holographic laser processing is performed by variably shaping the beam using a computer generated hologram (CGH) displayed on a spatial light modulator (SLM).The problem is that in addition to the beam parameters in normal laser processing, a new parameter called beam shape has increased, and the difficulty of searching for the optimum value has increased.
The purpose of this research is to construct a processing machine for optimizing beam parameters in holographic laser processing. Therefore, we introduced a rotating stage to perform continuous processing and measurement while changing the beam parameters without stopping the stage. Fig. 1 shows the experimental optical system.
The purpose of this research is to construct a processing machine for optimizing beam parameters in holographic laser processing. Therefore, we introduced a rotating stage to perform continuous processing and measurement while changing the beam parameters without stopping the stage. Fig. 1 shows the experimental optical system.