[18p-A405-1~11] 3.6 Laser processing (formerly 3.7)

[18p-A405-9] Improvement of Sensitivity of Real-Time Temperature Measurement during Laser Processing

〇Hideyuki Takada¹, Dai Yoshitomi¹, Aiko Narazaki¹ (1.AIST)

Keywords:ultra-short pulsed laser processing, real-time temperature measurement, non-thermal laser processing

We are currently developing a real-time temperature measurement system with high speed and high positional resolution that can follow rapid temperature changes in the vicinity of the processing point in order to realize highly accurate process control and quality control in ultra-short pulsed laser processing, which is a non-thermal processing technique. One of the main issues identified in the previous temperature measurement trial was to improve the sensitivity of the real-time machining point temperature measurement system, which is important for achieving a lower measurable temperature and a higher positional resolution.