The 70th JSAP Spring Meeting 2023

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[18p-B401-1~13] 15.4 III-V-group nitride crystals

Sat. Mar 18, 2023 1:00 PM - 4:30 PM B401 (Building No. 2)

Motoaki Iwaya(Meijo Univ.), Shuhei Ichikawa(Osaka Univ.)

1:45 PM - 2:00 PM

[18p-B401-4] Thick AlN layers grown on pillar-patterned AlN templates by HVPE

〇Shiyu Xiao1, Sho Iwayama2, Kenjiro Uesugi3,4, Kanako Shojiki1, Motoaki Iwaya2, Hideto Miyake1 (1.Grad. Sch. of Eng. Mie Univ., 2.Grad. Sch. of Eng. Meijo Univ., 3.MRPCO Mie Univ., 4.Grad. Sch. of RIS Mie Univ.)

Keywords:AlN, HVPE