[18p-B409-1~12] 12.3 Functional Materials and Novel Devices

[18p-B409-10] Fabrication of polyimide capacitive-type humidity sensors sandwiched by solution processed CNTs.

〇(M1)Jotaro Iguchi¹, Eiji Itoh¹ (1.Shinshu Univ.)

Keywords:humidity sensors, carbon nanotube

Conventional capacitance humidity sensors use ITO for the bottom electrode, and as the moisture-sensitive film is thined for high-speed response, the response time during dehumidification becomes longer than that during humidification.We attributed this problem to the hydrophilic nature of ITO and the formation of a water film at the electrode interface.In this study,we fabricate an all-coated polyimide capacitive-type humidity sensors sandwiched by solution processed CNTs by using water-repellent treated CNTs for the bottom electrode, and attempted to improve the response during dehumidification.