The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[18p-D519-1~15] 6.5 Surface Physics, Vacuum

Sat. Mar 18, 2023 1:00 PM - 5:15 PM D519 (Building No. 11)

Naoka Nagamura(NIMS), Kei Mitsuhara(KOBELCO RESEARCH INSTITUTE, INC.)

4:30 PM - 4:45 PM

[18p-D519-13] Study of Evaluation of the Initial State of Damage to the Glass Surface part2

〇(M1)Asato Yamaguchi1, Hiroshi Murotani1 (1.Tokai Univ)

Keywords:weathering, nanoindentation

When optical thin films are deposited on glass substrates that have minute burns that are not visible to the naked eye, the deposited films become unevenly colored or cloudy. Minute film burns are difficult to detect, and their presence may not be noticed until after the film is deposited. A technique to measure the presence of microscopic film flakes prior to deposition is a useful technique that can reduce defects in optical elements and components. In this study, we will investigate a method to evaluate micro flaking in a way that does not affect the appearance of glass substrates before deposition, and finally, we will investigate the effect of micro flaking on the structure of the deposited film.