[18p-D519-1~15] 6.5 Surface Physics, Vacuum

[18p-D519-14] Analytical study of vacuum conductance of argon gas through glass pipettes

〇Tomohide Takami¹, Chie Ohtomo¹, Naoki Kaneko¹, Kyo Shibuya¹, Kazuho Miyashita¹, Mizuki Ohta¹, Rio Yoneda¹, Mamiko Ozawa², Hideyuki Magara², Shuichi Ogawa², Tadashi Abukawa² (1.Kogakuin Univ., 2.IMRAM, Tohoku Univ.)

Keywords:Glass micropipette, Gas flow, pressure measurement

We have been developing a non-destructive inspection method for glass pipettes to analyze the vacuum conductance of the gas passing from the pipette tip top to the tail exit by measuring the entrance and exit pressures. In this presentation, we report on the improvement of the measurement accuracy of the conductance by measuring the exit vacuum pressures when the entrance pressure is fixed at 50 kPa or 10 kPa.