10:45 AM - 11:00 AM
[D-01-03] A new numerical method to simulate capacitively coupled plasmas
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OS27: マルチフィジックス解析における応用と計算効率化のための各種手法の提案
Wed. Jun 6, 2018 10:15 AM - 11:45 AM 会場D (11F)
座長:リチュウ トン(計測エンジニアリングシステム株式会社)
10:45 AM - 11:00 AM
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