Special Session: Transition-Metal Compounds: Novel Materials Synthesis and Property Measurements

[3-19A] Fabrication of BiFe_0.9Co_0.1O₃ nanodot array with electron-beam-lithographed HSQ mask

*Hajime Nakayama¹, Kota Yoshikawa¹, Koomok Lee¹, Manabu Yasui², Satoru Kaneko², Masahito Kurouchi², Kei Shigematsu^1,2,3, Masaki Azuma^1,2,3 (1. Laboratory for Materials and Structures, Tokyo Institute of Technology, 2. Kanagawa Institute of Industrial Science and Technology, 3. Sumitomo Chemical Next-Generation Eco-Friendly Devices Collaborative Research Cluster, Tokyo Tech.）（※This presenter is a candidate for the Student Award for Outstanding Presentation.)

Keywords:Multiferroics, Microfabrication