<strong>Influence of the Al content on microstructure of CVD Aluminum Titanium Nitride coatings</strong>

講演情報

Oral presentation

B » B-1:Hard Materials

[9D-B1] Hard Materials

2017年11月9日(木) 09:20 〜 11:25 Room D_Oral (2F, International Conference Hall III)

Chairperson: Hideaki MATSUBARA (Tohoku University, Japan), Chairperson: Masaru KAWAKAMI (Fuji Die Co., Ltd, Japan)

10:45 〜 11:05

*Sho Tatsuoka¹, Takuya Ishigaki¹, Kenichi Sato¹, Kosuke Yanagisawa¹, Kenji Yamaguchi¹, Shin Nishida¹ (1. Mitsubishi Materials Corporation(Japan))

キーワード：chemical vapor deposition, coating, AlTiN, mechanical property, lamellae structure

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