[P-A1] Modeling and Simulation

[P-A1-01] TiN and AlN reaction synthesis: laser control and modeling

*Igor Shishkovsky¹ (1. P.N. Lebedev Physics Institute of Russian Academy of Sciences, Samara branch(Russia))

キーワード：selective area laser deposition vapor infiltration (SALDVI), self-propagated high-temperature synthesis (SHS), aluminum nitride (AlN) , titanium nitride (TiN)